▶ Easy Operation with 7” Touch Screen
▶ Vacuum-Auto Coating-Vent w/ One Touch Operation
▶ Parameter Saving with Library Function
▶ 7 Sample Stubs(Φ14mm) Together in Chamber
▶ Prevent damage to Specimens(Low Current:1~10mA)
▶ Minimize Footprint with Compact Product Size
▶ Very Good Uniformity with Pirani Gauge Inside
Specification
Vacuum Degree : 5.0 x 10-2torr
Ion Current : 1 ~ 10mA (1mA/step)
Target Material : Au or Pt
Chamber Size : Φ140mm(D) x 100mm(H)
Sample Stage : Φ50mm(D) x 30mm(H)
Target Size : Φ53mm(D) x 0.1(T)
Sputter Time : 1 to 600sec (5sec/step)
Vacuum Pump : 100L/min, Rotary Pump, 22.5kg
Dimension : 380(W)x 240(D) x 250(H)mm, 10kg
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